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ULPD Gas Systems
BOC's ULPD (Ultra Low Particulate Design)range of gas panels is manufactured specifically to meet the requirements of semiconductor and other high technology industries.
Features
The panels are constructed under class 100 conditions using all electropolished components. Standard surface finish is 0.4 microns with 0.25 microns and 0.125 microns as options.
Orbital butt welds and face seal fittings are used for joints in the gas path.
Components are selected on both performance and purity grounds. All regulators are tied diaphragm to eliminate creep and ensure shut off under harsh conditions. The manual valves are designed with no gas wetted springs or threads to minmize particle generation. Smooth flow passages, low internal volume and fine surfaces ensure efficient purging and fast clean up.
Following manufacture, all systems undergo the following tests:
- Pressure test to maximum operating pressure
- 24 hour pressure drop test
- Helium leak test to 10-9cc/s
| Model | Description |
|---|---|
| ULPD system 2 & 3 | A simple self purging panel for inert gases: eg Ar,He,N2,SF6 and halocarbons |
| ULPD system 4 | Designed for inert gas purging of flammable and oxidising gases eg. H2 and N20 |
| ULPD system 5 | Provides the most efficient purging for toxic, corrosive and pyrophoric gases eg.HCl,SiH4,PH3 |
Additional options
Pneumatic shut off valve: For high pressure systems this valve reduces the cylinder pressure to about 35 bar.
Excess flow valve: Provides automatic shut off in the event of a system leak.
Inlet filter: Protects the regulator from damage by particulates.
Vacuum generator: Improves purging efficiency and dilutes the vented gas.
Electronic sensors: Excess flow,high outlet pressure and low purge gas pressure sensors can be fitted.
